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Spectropur Pressure regulator E71-VCR

Spectropur Pressure regulator E71-VCR

  • Pressure regulator for hazardous gases and ultra high purity gases from grade 6.0
  • Single-stage regulator with anti vibration device
  • Pressure regulator can be evacuated
  • High control accuracy
  • Metal-to-metal seal to atmosphere
  • High surface quality
  • Tied diaphragm
  • Minimized internal volume for short purge times
  • Electro-polished surfaces (gas wetted)
  • Simple outlet pressure limitation by handwheel
  • 100 % helium-leak-tested
  • Assembly in clean room class ISO 5.0

 

Inlet pressure P1: max. 200 bar
Outlet pressure P2: max. 1,5 / 4 / 10 bar
Materials
Body: Stainless steel 1.4404
Diaphragm: Hastelloy C276
Other gas wetted parts: Stainless steel 1.4404
Sealings P1=50 bar: PTFE
Sealings P1=200 bar: PCTFE / PVDF
Surface roughness (gas wetted areas): Ra,max ≤ 0,25 μm
Ra,Avg ≤ 0,18 μm
Temperature range: -20°C to +60°C
Leak rates to atmosphere: ≤ 10-9 mbar l/s He
Leak rates via valve seat: ≤ 10-6 mbar l/s He
cv-value: cv = 0,7 (kv = 0,6)
Weight: 1.5 kg
In- / outlet connectors 1/2“-VCR male or
1/2“-VCR female

 

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