Spectropur Pressure regulator E71-VCR

Pressure regulator for hazardous gases and ultra high purity gases from grade 6.0
Single-stage regulator with anti vibration device
Pressure regulator can be evacuated
High control accuracy
Metal-to-metal seal to atmosphere
High surface quality
Tied diaphragm
Minimized internal volume for short purge times
Electro-polished surfaces (gas wetted)
Simple outlet pressure limitation by handwheel
100 % helium-leak-tested
Assembly in clean room class ISO 5.0

Inlet pressure P1:	max. 200 bar
Outlet pressure P2:	max. 1,5 / 4 / 10 bar
Materials
Body:	Stainless steel 1.4404
Diaphragm:	Hastelloy C276
Other gas wetted parts:	Stainless steel 1.4404
Sealings P1=50 bar:	PTFE
Sealings P1=200 bar:	PCTFE / PVDF
Surface roughness (gas wetted areas):	Ra,max ≤ 0,25 μm Ra,Avg ≤ 0,18 μm
Temperature range:	-20°C to +60°C
Leak rates to atmosphere:	≤ 10-9 mbar l/s He
Leak rates via valve seat:	≤ 10-6 mbar l/s He
cv-value:	cv = 0,7 (kv = 0,6)
Weight:	1.5 kg
In- / outlet connectors	1/2“-VCR male or 1/2“-VCR female

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