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Spectropur Pressure regulator E51-2-VCR
Product
/
SPECTRON
/
Line pressure regulators
/ Spectropur Pressure regulator E51-2-VCR
Spectropur Pressure regulator E51-2-VCR
BENEFITS
SPECIFICATION
Pressure regulator for hazardous gases and ultra high purity gases from grade 6.0
single-stage version
Pressure regulator can be evacuated
High control accuracy
Metal-to-metal seal to atmosphere
High surface quality
Tied diaphragm
Minimized internal volume for short purge times
Electro-polished surfaces (gas wetted)
Simple outlet pressure limitation by handwheel
100 % Helium leak tested
Assembly in cleanroom class ISO 5.0
Operating pressure:
max. 300 bar
Materials
Body:
Stainless steel 1.4404
Diaphragm:
Hastelloy C276
Other gas wetted parts:
Stainless steel 1.4404
Sealings
E51 (P1 ≤ 50 bar) or
2. stage E53:
PTFE
E51 (P1 > 50 bar) or
1. stage E53:
PCTFE or PVDF
Surface roughness:
Ra,max ≤ 0,25 μm
(gas wetted areas):
Ra,Avg ≤ 0,18 μm
Temperature range:
-20°C to +60°C
Leak rates to atmosphere:
≤ 10-9 mbar l/s He
Leak rates via valve seat:
≤ 10-6 mbar l/s He
cv-value:
cv = 0,24 (kv = 0,2)
Weight:
1.2 / 1.7 kg
In- / outlet connectors
1/4“-VCR male or 1/4“-VCR female
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