Spectropur Pressure regulator E51-2-VCR
Spectropur Pressure regulator E51-2-VCR
- Pressure regulator for hazardous gases and ultra high purity gases from grade 6.0
- single-stage version
- Pressure regulator can be evacuated
- High control accuracy
- Metal-to-metal seal to atmosphere
- High surface quality
- Tied diaphragm
- Minimized internal volume for short purge times
- Electro-polished surfaces (gas wetted)
- Simple outlet pressure limitation by handwheel
- 100 % Helium leak tested
- Assembly in cleanroom class ISO 5.0
| Operating pressure: | max. 300 bar |
| Materials | |
| Body: | Stainless steel 1.4404 |
| Diaphragm: | Hastelloy C276 |
| Other gas wetted parts: | Stainless steel 1.4404 |
| Sealings E51 (P1 ≤ 50 bar) or 2. stage E53: | PTFE |
| E51 (P1 > 50 bar) or 1. stage E53: | PCTFE or PVDF |
| Surface roughness: | Ra,max ≤ 0,25 μm |
| (gas wetted areas): | Ra,Avg ≤ 0,18 μm |
| Temperature range: | -20°C to +60°C |
| Leak rates to atmosphere: | ≤ 10-9 mbar l/s He |
| Leak rates via valve seat: | ≤ 10-6 mbar l/s He |
| cv-value: | cv = 0,24 (kv = 0,2) |
| Weight: | 1.2 / 1.7 kg |
| In- / outlet connectors | 1/4“-VCR male or 1/4“-VCR female |








