• Stainless steel valves for manual or automatic     (pneumatic) shut-off
• Diaphragm metal-to-metal sealed to atmosphere
• Fully functional even when valve is evacuated
• Minimized internal volume for short purge times
• No parts in the gas-wetted area exposed to friction or torsional stress provide minimum particle generation
• Embedded soft seat seal made of PCTFE or PVDF permits frequent operation without loss of tightness
• Modular design for easy replacement of internal parts
• Clearly legible position indication (on/off)
• 100 % Helium-leak-tested
• Assembly in cleanroom class ISO 5.0
• Modular design
• Pneumatic actuator optional for line pressure 25, 100, 200 and 300 bar
• Optional with inductive proximity switch

Materials

Body: stainless steel 1.4404 Diaphragms: Hastelloy C276 Other gas wetted parts: stainless steel 1.4404 Valve seat: PCTFE or PVDF

Surface roughness

Rₐ, max. ≤ 0,25 µm (gas-wetted areas) Rₐ, Avg. ≤ 0,13 µm

Leak rate

(to atmosphere) 1 x 10⁻⁹ mbar l/s He (via seat) 1 x 10⁻⁶ mbar l/s He

In- / Outlet

1/4″ VCR-male 1/4″ VCR-female tube stub 1/4″x28mm