Spectropur Point of use stick EES55-1-VCR

Spectropur Point of use stick EES55-1-VCR

  • Point of use stick for corrosive gases and gas mixtures with corrosive components from grade 6.0
  • High control accuracy
  • Pressure regulator with tied diaphragm
  • Orbital welded VCR-connections
  • Point of use can be evacuated
  • Manual or pneumatic valve options:
  • process gas inlet (TPI)
  • purge gas inlet (SPI)
  • purge gas vent (SPV)
  • process gas outlet (TPO)
  • 100 % Helium leak tested
  • Assembly in clean room class ISO 5.0

 

Inlet pressure P1:
max. 50 bar
Outlet pressure P2:
max. 1.5 / 4 / 10 bar
Materials
Body:
Stainless steel 1.4404
Diaphragms:
Hastelloy C276
Other gas wetted parts:
Stainless steel 1.4404
Sealings Pressure regulator:s:
PTFE
Valves:
PCTFE or PVDF
Surface roughness (gas wetted areas):
Ra,max ≤ 0.25 μm
Temperature range:
-20°C to +60°C
Leak rate
to atmosphere:
≤ 10-9 mbar l/s He
via valve seat:
≤ 10-6 mbar l/s He
cv-value:
cv = 0.24 (kv = 0.2)
Weight:
2.4 … 5.0 kg
Connectors
Inlet:
VCR-female
Outlet valve / pressure gauge:
VCR-female
Outlet filter / check valve:VCR-male

 

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