Pressure control panel for flammable gases and ultra high purity gases from grade 6.0
SBE: purge- and connection block or
SR: pigtail and single valves with
– manual waste gas valve (HPV)
– manual process gas valve (HPI)
– manual purge gas valve (PGI)
Check valve to prevent process gas from flowing back into the purge gas line
Pre-filter
Pressure regulator with tied diaphragm
Burst disc
Stainless steel valves for manual or automatic (pneumatic) shut-off
Minimized purge volume (SBE)
Electropolished surfaces (gas wetted)
Clearly legible handwheel position indication (on/off)
100 % Helium leak tested
Assembly in clean room class ISO 5.0
Modular design with many options
Operating pressure:
max. 300 bar
Materials
Body:
Stainless steel 1.4404
Diaphragms:
Hastelloy C276
Other gas wetted parts:
Stainless steel 1.4404
Sealings 51 (P1 ≤ 50 bar) or 2. stage 53:
PTFE
51 (P1 > 50 bar) or 1. stage 53 and valves:
PCTFE or PVDF
Surface roughness (gas wetted areas)
Ra,max ≤ 0.25 μm
Surface roughness (gas wetted areas)
Ra,Avg ≤ 0.18 μm
Temperature range:
-20°C to +60°C
Leak rate to atmosphere:
≤ 10-9 mbar l/s He
Leak rate via valve seat:
≤ 10-6 mbar l/s He
cv-value:
cv = 0.24 (kv = 0.2)
Weight:
ca. 8 kg
Connectors
• Cylinder connection (process gas inlet) • VCR-female (waste gas, process gas outlet) • VCR-male (purge gas)
