Spectropur Pressure control panel SP3

Spectropur Pressure control panel SP3

  • Pressure control panel for inert gases and ultra high purity gases from grade 6.0
  • SR: pigtail and single valves with – manual waste gas valve (HPV) – pneumatic process gas valve (HPI)
  • Pre-filter
  • Pressure regulator with tied diaphragm
  • Burst disc
  • Stainless steel valves for manual or automatic (pneumatic) shut-off
  • Electropolished surfaces (gas wetted)
  • Clearly legible handwheel position indication (on/off)
  • 100 % Helium leak tested
  • Assembly in clean room class ISO 5.0
  • Modular design with many options

 

Operating pressure:max. 300 bar
Materials
Body:Stainless steel 1.4404
Diaphragms: Hastelloy C276
Other gas wetted parts: Stainless steel 1.4404
Sealings 51 (P1 ≤ 50 bar) or
2. stage 53:		PTFE
51 (P1 > 50 bar) or
1. stage 53 and valves:		PCTFE or PVDF
Surface roughness
(gas wetted areas)		Ra,max ≤ 0.25 μm
Surface roughness
(gas wetted areas)		Ra,Avg ≤ 0.18 μm
Temperature range:-20°C to +60°C
Leak rate to atmosphere:≤ 10-9 mbar l/s He
Leak rate via valve seat:≤ 10-6 mbar l/s He
cv-value:cv = 0.24 (kv = 0.2)
Weight:ca. 6 kg
Connectors• Cylinder connection (process gas inlet)
• VCR-female (waste gas, process gas outlet)

 

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