Spectropur Pressure regulator E51-3-VCR

Spectropur Pressure regulator E51-3-VCR

  • Pressure regulator for hazardous gases and ultra high purity gases from grade 6.0
  • single-stage version
  • Pressure regulator can be evacuated
  • High control accuracy
  • Metal-to-metal seal to atmosphere
  • High surface quality
  • Tied diaphragm
  • Minimized internal volume for short purge times
  • Electro-polished surfaces (gas wetted)
  • Simple outlet pressure limitation by handwheel
  • 100 % Helium leak tested
  • Assembly in cleanroom class ISO 5.0

 

Operating pressure:max. 300 bar
Materials
Body:Stainless steel 1.4404
Diaphragm:Hastelloy C276
Other gas wetted parts:Stainless steel 1.4404
Sealings E51 (P1 ≤ 50 bar) or 2. stage E53:PTFE
E51 (P1 > 50 bar) or 1. stage E53:PCTFE or PVDF
Surface roughness:Ra,max ≤ 0,25 μm
(gas wetted areas):Ra,Avg ≤ 0,18 μm
Temperature range:-20°C to +60°C
Leak rates to atmosphere: ≤ 10-9 mbar l/s He
Leak rates via valve seat:≤ 10-6 mbar l/s He
cv-value:cv = 0,24 (kv = 0,2)
Weight:1.2 / 1.7 kg
In- / outlet connectors1/4“-VCR male or 1/4“-VCR female

 

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